JPH0189748U - - Google Patents
Info
- Publication number
- JPH0189748U JPH0189748U JP18532187U JP18532187U JPH0189748U JP H0189748 U JPH0189748 U JP H0189748U JP 18532187 U JP18532187 U JP 18532187U JP 18532187 U JP18532187 U JP 18532187U JP H0189748 U JPH0189748 U JP H0189748U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pusher
- clamping plate
- roller
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18532187U JPH0189748U (en]) | 1987-12-07 | 1987-12-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18532187U JPH0189748U (en]) | 1987-12-07 | 1987-12-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0189748U true JPH0189748U (en]) | 1989-06-13 |
Family
ID=31476640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18532187U Pending JPH0189748U (en]) | 1987-12-07 | 1987-12-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0189748U (en]) |
-
1987
- 1987-12-07 JP JP18532187U patent/JPH0189748U/ja active Pending
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